研究结果表明，对于微晶玻璃等脆性材料，其表面粗糙度主要与砂轮的平均磨粒尺寸、砂轮速度、进给量及磨削深度等因素有关。
It is showed that the surface roughness is mainly related with the average grain size and feed per wheel revolution for the brittle materials such as single crystal silicon.
研究结果表明，对于单晶硅等脆性材料，其表面粗糙度主要与砂轮的平均磨粒尺寸、进给量等因素有关。
It is shown that the surface roughness is mainly related with the average grain size and feed per wheel revolution for the brittle materials such as single silicon.
增加砂轮转速、砂轮摆动和轴向进给量可以提高单晶金刚石的研磨效率。
The increase of the wheel speed, the swing frequency and the feed of shaft direction conduce to improving the grinding efficiency.
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