在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
本文叙述在电感储能电路系统中，采用人工过零方法开断脉冲高压强流直流电路时，开断电路参数的匹配，并给出了用真空开关进行试验的结果。
This paper describes the breaking research in HVDC circuit with inductor-energy-storing aad high implue current , also gives the parameter matching of breaking circuit and the test results.
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