同时采用质量流量控制器、单片机为主体的电路控制系统。
The circuit control system consists of a mass flow controller and a CPU mainly.
本文提出了一种可用于集成电路装配和质量控制的、带有双投影物镜和全息光学元件散射全息屏幕的投影型全息显微镜（PHM）系统。
A projection-type holographic microscope with double projection-objectives and a holographic screen used for integrated circuits assembly and quality control is described.
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