本文从MOEMS倾斜下电极扭臂式光开关出发，介绍了动力学分析方法的过程。
This paper presents theoretical analysis on the dynamic response of a MOEMS optical switch with a slant lower electrode.
从基于微机械光电系统（MOEMS）的倾斜下电极扭臂式光开关出发， 求解雷诺方程， 得到空气压膜阻尼系数和阻尼力矩的分析公式。
This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) optical switch with a slant lower electrode.
对电极经过优化设计的场畸变间隙开关的可控特性和击穿时延进行了较深入的研究。
The triggering feature and break down delay for the field distortion spark gap with optimized electrodes have been studied.
应用推荐