电容式微加速度计的噪声包括机械热噪声和电热噪声；
The noise of capacitive micro accelerometer include mechanical thermal noise and electrical thermal noise;
根据设计的单轴电容式微加速计分析了微加速计的建模方法以及加速度计性能指标与设计参数之间的数学关系。
According the designed single axis micro accelerometer, its modeling means is presented. The relations between its design parameters and its performance index are analyzed.
介绍了一种新型基于滑膜阻尼的电容式微机械加速度计。
A novel micromachined capacitive accelerometer, based on slide-film damping principle, was reported.
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