电子发射器件，电子源基片，成像设备及其生产方法。
Electron-emitting device, electron source substrate, imaging apparatus and production method thereof.
氢化硅薄膜由于在红外成像传感器、太阳能电池及薄膜晶体管等微电子器件中有着广泛应用前景而备受关注。
Hydrogenated silicon film attracts extensively attention due to its application on many kinds of microelectronic devices, such as infrared imaging system, solar cell and thin film transistor.
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