空间环境下直接面向运行轨道电子产品的热设计是产品设计的关键。
The thermal design of on-orbit electronic product under space environment is the key of the product design.
在本论文中，对于先进元件的制造上，浅接面的形成和热预算的控制是很重要的。
In this thesis, Sallow junction formation and low thermal budget control are important for advanced device manufacturing.
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