本文介绍用激光掺杂技术在高阻硅中掺入杂质来制造核辐射结型探测器的方法。
In this paper fabrication of nuclear radiation detectors by using laser-doping technique is reported.
激光掺杂存在一个阈值能量密度。掺杂浓度和深度的分布与预热温度和杂质镀层厚度有关。
It is found that there is a threshold energy density in laser doping, and distributions of dopant density and depth have relation to preheat temperature and plating layer thickness of the impurities.
这些应用大致涵盖激光掺杂、激光退火、激光沉积薄膜、激光引发固相反应和激光光刻等几方面。
They include laser doping, laser annealing, laser depositing film, solid-phase reaction induced by laser and laser photolithograph.
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