说明了激光外差测量原理。
The testing principle of the laser heterodyne measurement system is explained.
激光外差干涉仪以其测量精度高、抗环境干扰能力强等优点得到了广泛的应用。
Laser heterodyne interferometer has advantages of high measuring precision and anti-environment disturbance ability.
为了补偿激光外差干涉纳米测量中的非线性误差，提出了一种减小非线性误差的一次谐波方法。
To compensate of the nonlinearity error of heterodyne interferometers in nanometer measurement, a method for reducing the first harmonic nonlinearity is proposed.
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