测试本身只是一种工具，可以在特定条件下以合理的精度测量其特性。
The tests themselves are merely tools, with characteristics that can be measured with reasonable precision under specified conditions.
本文以实验为基础，提出在工具显微镜类仪器中，为了提高测量精度，应如何正确使用光（门东）。
On the basis of experiment, this paper proposes how diaphragms are used correctly with tooling microscope line equipment to improve measuring precision.
由于不要求被测样本为非绝缘体，原子力显微镜将可能成为边缘粗糙度测量精度要求不断提高的最有效工具。
AFM may be the most effective instrument to satisfy the demand of ITRS to improve the measurement precision constantly since its observed objects are not limited in nonconductor only.
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