设计实现了一种自动控制故障注入设备，给出了设备的结构框图和主要模块的功能框图。

A kind of automatic control fault insertion equipment has been designed and implemented. The structure block diagram of the equipment and the function block diagrams of the main modules are given.

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就目前而言，已有的离子注入技术(包括离子注入设备系统)尚不能满足甚亚微米器件和电路制造的需要。

Now, the present ion implantation technology, especially ion implantation equipment and systems, can not meet the needs in the manufacturing of deep submicron devices and circuits.

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利用该设备进行了故障注入试验，给出了典型故障注入的信号波形，验证了故障注入设备的可用性和效果。

A fault insertion test has been made by using the equipment. The signal waveforms of typical fault insertions are given, and the usability and effect of the equipment are validated.

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