射频辉光放电硅烷等离子体化学汽相沉积是制备氢化非晶硅薄膜的主要工艺技术。
Plasma chemical vapor deposition in silane radio frequency glow discharge is a main fabrication technology of hydrogenated amorphous silicon (a-Si: h) films.
本文采用CCD测量和图像处理技术对汽液固三相自然循环流动沸腾系统进行了可视化研究。
In this paper, a CCD measuring system and techniques of image dealing are used to carry out a visual investigation on a vapor-liquid-solid three-phase natural circulating flow boiling system.
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