这种方法基于氮等离子体动力学模型，适用于气压范围1-100毫托。
This method is based on the kinetic model of nitrogen and can be used in pressure range 1-100 mTorr.
本文提出了一种新的利用发射光谱测量感应耦合氮等离子体的电子温度的诊断方法。
A new diagnostic method using optical emission spectroscopy to determine electron temperature in inductively coupled nitrogen plasma is proposed.
最后讨论了在经过校温的系统上进行蓝宝石衬底的氢氮等离子体清洗实验，并通过RHEED图像评价清洗结果质量。
The cleaning of hydrogen and nitrogen ECR plasma on sapphire substrates are carried out in the calibrated temperature system and evaluated by analyzing RHEED image in ECR-PEMOCVD system.
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