所以在每层材料放置好之后，氮氟化物就被泵进工作舱中并分散开来，释放出高活性的氟原子来清洁墙壁。

So after each layer is deposited, nitrogen fluoride is pumped into the chamber and is split to release highly reactive fluorine atoms that clean the walls.

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沉淀溶解金属，硫化物和氟化物和减少像磷酸盐和氮之类的营养物。

Must be treated to neutralise acids, precipitate dissolved metals, sulphide and fluoride and reduce nutrients such as phosphates and nitrogen.

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