主要考察了氮化温度和氮气流量对缓冲层生长的影响。
The influence of nitridation temperature and nitrogen flow rate on the growth of buffer layers is emphasized.
考察了磷酸铝颗粒度、氨流量和氮化温度对氮化磷酸铝制备的影响。
The effect of the size of alumionphosphate precursor, ammonia flow and nitridation temperature on preparation of AlPON were investigated.
实验结果表明：随氮化温度升高、时间延长，各试样的氮化率及氮化反应速率常数提高。
The results show that nitriding rate and nitridation reaction rate constant are improved with the increase of nitridation temperature and time.
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