用椭圆偏振光谱法研究了热处理对射频辉光放电淀积的氢化非晶碳膜光学性质的影响。
Using spectroscopic ellipsometry, the influence of thermal annealing on optical properties of the plasma-deposited hydrogenated amorphous carbon films is investigated.
本文报导由碳氢气体的辉光放电分解而制备的氢化非晶碳膜的特性及其在金属表面防护上的应用。
This paper reports the properties of the hydrogenated amorphous carbon films prepared by glow discharge decomposition of hydrocarbon and the applications to metals surface protection.
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