所以在每层材料放置好之后,氮氟化物就被泵进工作舱中并分散开来,释放出高活性的氟原子来清洁墙壁。
So after each layer is deposited, nitrogen fluoride is pumped into the chamber and is split to release highly reactive fluorine atoms that clean the walls.
这些活泼的氟会导致无法的控制的同聚合体和特定金属的反应,释放出热量,导致NF 3的进一步分解。
These reactive species can lead to uncontrolled reactions with polymers and certain metals, liberating heat and causing further dissociation of NF3.
从人类活动中释放出来的物质(包括氟氯烃和卤代烷哈龙)同臭氧层中的臭氧分子发生化学变化,导致其破坏。
The destruction of ozone molecules in the ozone layer by chemical reaction with materials released from human activities, including chlorofluorocarbons and halons.
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