本文介绍的校准装置,它可以“用己知漏率值的参考漏孔相对比较法来校准漏孔”。
This report introduces the calibration apparatus which is need through the reference leak in the relative comparison method of the known leakage rate value to calibration leaks.
恒压式气体微流量计(CPFM)被多个国家级实验室选作为计量学设备,用来校准真空规和真空漏孔。
The constant pressure flowmeters (CPFMs) were used to calibrate vacuum leaks and vacuum gauges in some national laboratories.
在漏孔校准过程中,通过调节稳压室中的压力,很容易使标准气体流量与漏孔漏率非常接近或相等,从而避免四极质谱计的非线性影响。
In calibrating the leak, the pressure in the ballast chamber can be precisely controlled in such a way that the standard gas flow through the orifice is close or equal to the leak rate.
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