几何产品规范(GPS)。校准样品。带凹槽的塞子。
Geometrical product specification (GPS) - Calibration specimens - Plugs with grooves.
本文主要介绍了硅中硼离子注入校准样品的制备与研究。
Fabrication and research of calibration samples for boron ion implantation into silicon are discussed.
通过对样品的分析和标准样品的校准结果表明:前者准确度达95%,而后者为35%。
The results by actual sample analysis and calibration of standard samples show that its accuracy reaches 95%, while the latter is only 35%.
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