介绍了以DX - 3扫描电镜为基础，利用SDS - 2电子束扫描系统改装其偏转系统。
The deflection system of DX 3 has been rebuilt with SDS 2 system.
以明确的物理意义详细分析和讨论聚焦、扩束准直、扫描显示等光学系统的设计。
Design of optical system for the focusing, the collimating and the scanning is analysed and is discussed with precise physical meaning.
该系统使用了介质分束片，可以方便地进行散射角扫描。
Dielectric beam splitter was employed in this system, which facilitates the scan of scattering Angle.
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