结果表明：电火花线切割单晶硅损伤层主要由杂质元素重污染层、重熔层和含有高密度位错的弹性畸变层组成；
The results show that the damaged layer of silicon cut by WEDM mainly appears massive impurity elements, remelted and elastic distortion with a high density dislocation.
试样的表面应光滑，无外来杂质及损伤。成品应经打磨后裁制成相应尺寸。
The surface should be smooth, no foreign impurities and injury. The finished products should be polished after the cut into the appropriate size.
采用防静电处理的聚酯薄膜作为基材，具有防止灰尘和杂质吸附以及防止静电损伤功能的表面保护材料。
Adopted antistatic processing of polyester film is made as base material, it has prevent dirt and impurities adsorption and prevent electrostatic damage function of surface protective materials.
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