硅在半导体元件要单结晶:它需要有一个非常纯净的晶体形式,如果没有缺陷的晶体结构。
The silicon in semiconductor components has to be mono crystalline: it has to have a very pure crystal form without defects in the crystal structure.
然后执行热处理步骤,以便使有缺陷的半导体晶体材料的非晶化区域再结晶。
A thermal treatment step is next performed so as to recrystallize the amorphized region of the defective semiconductor crystal material.
提供了一种方法,其中,对有缺陷的半导体晶体材料执行非晶化步骤,随之以热处理步骤。
A method in which a defective semiconductor crystal material is subjected to an amorphization step followed by a thermal treatment step is provided.
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