显微衍射法
Microdiffraction method
以上为机器翻译结果，长、整句建议使用 人工翻译 。
前言： 对用电子显微镜测量薄膜厚度的三种方法：双束衍射法、污斑法、污线法进行了实验及比较分析。
The experiments , comparison and analysis for the three thickness measurement methods :two-beam diffraction method , contamination spot method and contamination line method were carried out.
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