To begin with, the earlier work for lithography simulation is introducted, which includes aerial image model, expose model for DNQs and chemically amplified photoresists(CARs), postbake model for CARs, and generic development model.
文章从介绍前人做的光刻模拟工作开始,包括空气影像成形模型、DNQ胶和化学放大胶的曝光模型、化学放大胶后烘模型和一般显影模型。
参考来源 - SU·2,447,543篇论文数据，部分数据来源于NoteExpress
结果放射自显影结果表明模型组大鼠脑内银颗粒密度显著高于对照组，尤其是纹状体。
Results The density of silver granules of the model group was higher than that of the control group, especially in the striatum.
在电子束曝光胶图形的三维显影模拟工作中，首次使用了最精确的三维线踪模型。
The most accurate ray-tracing model is used firstly on the development simulation of resist exposed by electron beam.
结论SHM模型相关冠状动脉的流速模式明显不同于正常状态，IPC对其无明显影响。
Conclusion the coronary flow velocity pattern of the SHM model was different from the baseline, IPC has no effect on it.
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