文章提出了一种新的检测方法即用数字波面干涉仪检测平晶的平行度。
A new laser interferometer method is presented and used to quick measurement of parallelism of optical flat.
本文通过对移相式数字波面干涉仪得到的测试波面进行处理实现锥体棱镜、屋脊棱镜和直角棱镜角度测试的数字化和自动化。
The automatic test of Corner Cube Reflector (CCR), Roof Prism and Right-angle Prism is achieved by calculating the wavefront got from the digital phase-shifting interferometer.
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