此激光平行光管具有以前平行光管的优点,且可以与数字相移干涉仪对接,直接进行波前误差的高精度测量。
The laser collimator not only has the advantages of existing ones, but also can be used to measure wavefront error with high accuracy interferometer.
文章提出了一种新的检测方法即用数字波面干涉仪检测平晶的平行度。
A new laser interferometer method is presented and used to quick measurement of parallelism of optical flat.
通过与干涉仪测量结果相比较,验证了数字刀口检测方法的可行性,为镜面误差的加工修正提供了依据。
Comparing with the testing results of interferometer, the digital knife-edge testing technology is available and can provide theoretical basis for surface modification.
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