• reticle stage - 引用次数：5

  Taking advantage of synchronization compensator, position compensation is fulfilled by using the fine reticle stage to compensate the deviation between position of the wafer stage and wafer stage.

  设计了同步补偿器,利用掩模台微动台运动实时补偿掩模台与硅片台间的位置同步误差。

  参考来源 - 极紫外光刻机工件台精密机械及控制相关技术

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