经实验证明该电源能满足SECM探针驱动中微定位的控制需要，具有精度高、电路简单、可靠性强的特点。

Test proves that the power supply can achieve demands of probe positioning of SECM, and power supply has high precision, simply circuit, and high reliability.

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另一个最新发明是针对12英寸探针台eg6000而生的精密的直接驱动技术，该技术让这一设备达到了同系列产品现今可达到的最高精确性。

Another recent innovation is their precision direct-drive technology for their 12-inch prober, the EG6000, which allows this system to achieve the highest accuracy available today.

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结果表明：使用了快速预冷汽液分离器后，探针预冷时间大大缩短，并随驱动压力增大而减小；

The results show that the precooling time of the probe is shortened significantly with the help of the vapor-liquid separator, and decreases with the driven pressure.

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