以弹性梁为敏感元件的谐振式传感器。振梁的固有振动频率随它两端所受的力而变化,通过相应的测量电路就可获得与被测力成一定关系的频率信号。振梁一般连接于弹性受力机构上以感受被测压力。振梁式传感器用于测量静态或缓变压力。
我们用该方法计算了硅压阻式加速度传感器五阶梯硅梁固频和振型。
We calculated the natural frequencies and mode of vibration for a five stepped Si-beam of Si-piezoresistive accelerometer.
叙述了双端调谐音叉石英振梁式重力传感器的结构和工作原理。
The structure and operation principle of a double-sides tuning fork quartz vibrating beam gravity sensor was introduced.
湿度传感器大致可以分为下列几种类型:电容式、电阻式、悬臂梁式、晶振式、以及热电偶式。
Humidity sensors can be categorized into capacitive, resistive, mechanical, oscillating and thermo elemental type based on the sensing principle used.
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