细分为增加步进分辨率，并降低共振问题，在低速扭矩变化和。
Microstepping provides increased step resolution, and reduces torque variations and resonance problems at low speed.
该研究可以为基于抛光头旋转轴扭矩变化的CMP终点检测方法提供理论依据。
The research results provide a theoretical foundation for the CMP endpoint detection method based on the change of the torque of the polishing head rotational spindle.
在恒转速减扭矩的变工况过程中，随着扭矩变化率的增大微粒排放量逐渐减小。
For operating conditions with uniformly drop of torque, particulate emissions decrease gradually with increase of torque drop rate.
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