1986年，诺贝尔奖金获得者宾尼等人发明了发明了原子力显微镜原子力显微镜（Microscope），），简称简称AFM。p ），），简称简称率为率为30 Å。
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显微镜 [光] microscope ; Olympus ; TEM ; Leica ; microscope
电子显微镜 [光] electron microscope ; EM ; FESEM ; HRTEM
显微镜座 microscope base ; Microscopium Mikroskop ; Microscopii
原子力显微镜 Atomic Force Microscopy ; AFM ; Atomic Force Microscope ; non-contact AFM
金相显微镜 Metallurgical Microscopy ; Metallography microscope ; [光] [材] metalloscope ; metallomicroscope
偏光显微镜 polarized light microscopy ; [光] polarizing microscope ; [光] polarization microscope
扫描电子显微镜 Scanning electron microscope ; SEM ; FESEM ; JEOL
扫描探针显微镜 Scanning Probe Microscopy ; SPM ; scanning probe microscope ; Scanning Probe
扫描隧道显微镜 scanning tunneling microscope ; STM ; Rastertunnelmikroskop ; Electron tunnel microscopy
The Digital Micromirror Devices (DMD) technology is an important development direction of the Micro Electro Mechanical Systems (MEMS).
数字微镜装置（DMD）技术是微电子机械系统（MEMS）的一个重要发展方向。
参考来源 - 数字微镜装置的光机电控制系统研究Optimal design of F-P MCIRDA has been achieved and structure parameters of movable micro-mirror has been determined by theoretical analysis.
通过理论分析，完成了F-P MCIRDA的优化设计，确定了可动微镜的结构参数。
参考来源 - 微机械法布里Combining phase unwrapping and group unwrapping, the out-of-plane displacement of micromirror is successfully measured with satisfied results.
结合相位去包裹技术和组间去包裹技术,成功完成微镜离面运动测量并获得满意结果。
参考来源 - MEMS三维动态测试系统中数据处理技术的研究与实现Two typical MEMS devices, Micro-Switch and Micro-Mirror, are designed, including structure, process and driving principle. Simulation of two devices was carried out, which included electricity and stress-strain analysis.
设计了两种典型的MEMS器件微开关和微镜,包括结构和工艺,以及它们的驱动原理,对两种器件的加工工艺进行了详细的阐述。
参考来源 - MEMS器件的计算机辅助设计与模拟方法研究Numerical calculated results show that parameters,such as voltage,geometry dimensions of the micro mirror electrodes etc,can affect the edge effect,which leads a larger error in static response.
数值分析表明,微镜的激励电压、微镜电极的几何尺寸等参数都会影响微镜的边缘效应,从而使微镜的静态响应产生较大的误差。
参考来源 - 考虑边缘效应的微镜静电力学性能分析·2,447,543篇论文数据，部分数据来源于NoteExpress
从荧光的基础知识入手，简略描述荧光星微镜的特点。
Beginned with basic knowledge of fluorescence, fluorescence microscope characteristics are briefly described.
用扫描电子正微镜观察20多个失效金刚石拉丝模的模口形貌。
More than 20 pieces of failure wire drawing diamond dies were analyzed by SEM.
结果对比表明，这种W - M函数可用于微镜表面的建模和形貌分析。
The result shows that the W-M function is efficient in creating models and analyzing the topography of MEMS surface.
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