本文研究了谐振式硅微结构压力传感器在单频激励和双频激励情况下的非线性振动特性。
The nonlinear vibration characteristics of resonant silicon microstructure pressure sensor are investigated under single and two frequency excitation signal conditions.
然后在微桥上溅射镍—铬电阻薄膜，形成温敏传感器微结构，并对其温度电阻特性，热响应时间进行了测量。
After sputtering with N-Cr, a microstructure of temperature-sensitive sensor was formed, and its character of R-T and thermal response time constant were measured.
本文报道有限元方法在膜片型微结构气敏传感器设计中的应用。
The application of finite element method (FEM) in the design of a membrane-type micro gas sensor is reported.
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