介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。
Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.
器件采用微电子机械加工技术和键合技术研制。
The two parts are fabricated by MEMS technology and combined as aw.
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