微机电系统 MEMS ; Micro Electro Mechanical Systems ; microelectromechnical system ; Micro-Electro-Mechanical Systems
射频微机电系统 RF MEMS ; RFMEMS
微机电系统显示器 DMD
微机电系统设计 Introduction to MEMS Design ; MEMS CAD ; micro-electro-mechanical system design
宽比微机电系统 HARMEMS
生物微机电系统 Biological micro electromechanical systems
微机电系统模块 MEMS Module
微机电系统实验室 MEMS lab
微机电系统和传感器制造商MEMSIC，正计划在其IRIS 传感器上使用 Mote Runner。
MEMSIC, a micro-electromechanical systems and sensor manufacturer, plans to offer Mote Runner on its popular IRIS sensor.
为了提高微机电系统中静电-结构耦合数值计算速度，提出了一种新的针对微结构小变形的静电-结构耦合高效率数值计算方法。
In order to improve the efficiency for coupled electromechanical analysis of MEMS system, a new efficient numerical approach for electrostatic MEMS with small deformations is presented.
介绍了微机电系统当前的进展与发展前景。
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