微机械材料的杨氏模量测量是随着微机械构件的产生而提出的一项新技术。
Young's modulus measurement of micro machined materials is a new technique proposed with the appearance of the micro machined parts.
原子力显微镜（AFM）的微探针系统是典型的微机械构件，它在接触扫描过程处于耦合变形状态。
Micro cantilever probe of atomic force microscope (AFM) is a typical micro mechanical component, which is under a coupling deformation during the contact scanning process.
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