分析了目前微小电容测量电路的基本原理、电路特点以及存在的问题。
Analysed the basic theory of micro-capacitance gauging circuit, the characteristics of circuit, and the problems now exist.
介绍了比较典型的微小电容测量电路及其基本原理，提出了采用数字信号处理技术实现微小电容的测量方法。
Introduce a relatively small typical capacitance measurement circuit and its basic principle, the use of digital signal processing technology to achieve small capacitance measurement method.
变气隙式电容传感器具有灵敏度高、特别适用于微小位移的非接触测量，对被测系统影响小。
Variable-gapcapacitance sensor has high sensitivity, specially applying to non-contact measurement of micro displacement, and slightly affecting the system to be measured.
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