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该干涉仪可以实时测量物体的微小振动。
It is used to measure micro vibration of an object in real time.
研究振动幅度小于激光半波长的微小振动的测量方法。
A method of measuring small vibration with an amplitude lower than half that of the wavelength of laser is developed.
设计了一种半导体激光干涉测量仪,可以实时测量物体的微小振动。
A new laser diode interferometer for micro vibration measurement is proposed. The interferometer can measure micro vibrations of an object in real time.
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