Lots of high-tech fields depend on micro position technique. Since piezoelectric micro position technique has a great deal strongpoint, it is turning into study hotspot both here and abroad.
许多高科技领域都需要微定位技术的支持，压电微定位技术由于有诸多优点，正成为近年国内外的研究热点。
参考来源 - 空间分布压电驱动的多自由度微定位工作台位姿控制模型与实验研究The fine pointing micro-positioning experiment systems are built laterFirstly, on the basis of analyzing the principle of APT system,executing APT task by using compound-axis control structure is proposed.
精瞄偏转镜是精瞄微定位系统的核心部件,通过精瞄偏转镜的偏转运动完成光路的调整。
参考来源 - 激光星间通信终端精瞄微定位系统关键技术的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
此隔振设计方法对超精密机床、超微定位机构超低传递率隔振设计有一定的参考价值。
This isolation designing method has a certain value of reference to isolation design on super-low transmission ratio of super-precision machine tools and super-micro positioning mechanisms, etc.
仿真结果表明，采用微定位工作台进行在线振动补偿，可有效地提高加工工件的表面质量。
The simulation results show that the machining accuracy of the workpiece can be effectively improved by utilizing the micro-positioning workpiece table to implement dynamic compensation.
经实验证明该电源能满足SECM探针驱动中微定位的控制需要，具有精度高、电路简单、可靠性强的特点。
Test proves that the power supply can achieve demands of probe positioning of SECM, and power supply has high precision, simply circuit, and high reliability.
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