在柔性印刷电路板上形成与芯片阵列对应的微型加热器阵列，针对各芯片进行分散的温度补偿。
An array of miniature heaters corresponding to the array of PCR chips is made on a flexible printed circuit board that provides distributed temperature compensation to each PCR chip.
第三，用溅射、光刻等工艺在微型腔体底部制作微型加热器和温度传感器，实现对反应腔体的加热及其温度的精确测量，提供PCR扩增反应所需的温度条件。
The third part is to use the sputtering, photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the PCR reaction.
最终开发出在微型悬臂梁上集成了电阻加热器、压阻敏感器和纳米针尖的纳机电探针制造技术。
The integration technology of the heater and piezoresistor on one ultrathin cantilever has been finally completed.
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