Wavelength tuning interferometey test system of the parallel plates has been established, and several interferograms have been collected using the phase shift of wavelength tuning.
搭建了波长调谐干涉仪测量平行平板的实验系统,采集了波长移相多幅干涉图。
参考来源 - 平行平板干涉测量技术研究·2,447,543篇论文数据，部分数据来源于NoteExpress
对平行平板微型槽中气体滑移流动的压强分布特性进行了研究。
In this paper, pressure distribution of gaseous slip flow in parallel plates microchannel was studied.
提出一种可提高平行平板角位移干涉测量仪测量精度的优化设计方法。
An optimal design method of parallel plate interferometer is proposed in order to increase the measurement accuracy of angular displacement.
文末算例表明，渐缩间隙模型的环隙漏失量比平行平板模型的环隙漏失量小得多。
Calculations show that the annular clearance leakage by the mode of gradually reducing clearance is much less than that by the mode of equidimension clearance.
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