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MEMS加工工艺的核心是工艺模型。
The kernel problem in virtual MEMS fabrication process is process model.
面向过程的虚拟装配工艺规划系统对装配工艺模型提出了新的要求。
The process oriented virtual assembly process planning system brings forward new requirements for the assembly process model.
通过3d工序图模型和参数化空间尺寸链模型的映射，构造工艺模型结构。
Through the map of 3d process picture sheet model and the parameterization of 3d dimension chain model, a process model structure was constructed.
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