在此基础上建立了射频激励CO_2激光器放电气体等效电路，为射频电源的成功研制准备了必要的条件。
Based on the analysis and study, the RF excited CO_2 laser of discharging gas equivalent circuit can be designed and provide the essential condition of the RF power.
本文首先对比研究了两种以氧气作为放电气体的等离子体：电感式射频辉光等离子体(RF)和介质阻挡放电等离子体(DBD)氧化纳米炭黑的工艺。
Firstly, it was contrastively studied that the nanometer carbon black was oxidized by two kind of oxygen plasma: radio frequency discharge (RF) and dielectric barrier discharge (DBD).
真空室内的气体等离子体可由热灯丝或射频放电产生，4另外还配置了4个金属等离子体源、两套磁控溅射靶和冷却靶台。
The plasma can be 4 generated by hot-cathode discharge or RF discharge of gas. In addition, the device has four metal plasma sources, two magnetron sputtering targets, cold and hot target supports.
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