机械密封 [机] mechanical seal ; Meachnical sealing part ; Burgmann ; Machinery seal
机械密封泵 pump with mechanical seal
串联机械密封 [机] tandem mechanical seal
磁力机械密封 [机] magnetic mechanical seal
单端面机械密封 [机] single mechanical seal ; single end face mechanical seal ; single mechanical end face seal
外装式机械密封 [机] externally mounted mechanical seal
外流式机械密封 [机] mechanical seal with outward leakage
平衡式机械密封 [机] balanced mechanical seal
内流式机械密封 [机] mechanical seal with inward leakage
内装式机械密封 [机] internally mounted mechanical seal
这些加工过程对人体的危害很大，因此大多数工作都在密封室中进行，机械手臂会把晶圆从一个加工区移到另一个加工区。
Because those processes aren't exactly friendly to humans, much of this work happens inside sealed Chambers where robot arms move the wafers from one processing station to another.
弹簧性能的发生变化将会直接影响机械密封端面比压。
Changes in the spring performance will directly affect the mechanical seal face pressure.
这种情况出现会损坏机械密封。
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