To acquire NdFeB series thin films of good magnetic properties, orientated deposition techniques were used to make surface of thin films form orientated columnar crystals, and the mechanisms of good magnetic properties was explained.
为获得良好磁性能的NdFeB系薄膜,采用了定向沉积技术,使薄膜表面形成定向的柱状晶,并分析了其中的机理。
参考来源 - 定向沉积技术制备NdFeB系稀土永磁薄膜及其磁学性能的研究To acquire NdFeB series thin films of good magnetic properties, orientated deposition techniques were used to make surface of thin films form orientated columnar crystals, and the mechanisms of good magnetic properties was explained.
为获得良好磁性能的NdFeB系薄膜,采用了定向沉积技术,使薄膜表面形成定向的柱状晶,并分析了其中的机理。
参考来源 - 定向沉积技术制备NdFeB系稀土永磁薄膜及其磁学性能的研究·2,447,543篇论文数据,部分数据来源于NoteExpress
研究了沉积几何对定向形貌的影响。
The effect of geometry of deposition on oriented morphology is researched.
实验表明,若要得到定向形貌,沉积几何需有严格的限制。
The experiment shows that the geometry of deposition should be defined in order to gain the oriented morphology.
本发明描述使用定向反应物气流和相对于所述气流移动的基板的次大气压化学气相 沉积。
Sub-atmospheric pressure chemical vapor deposition is described with a directed reactant flow and a substrate that moves relative to the flow.
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