...资料商城[机械毕业设计|论文] 关键词：四维微调；调节定位；微调工作台；测量仪器；定位工作台。 [gap=1182]s: 4D Micro motion; poisoning control; Micro motion stage; Measuring instrument; location stage.
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本文介绍了电子束曝光机激光定位工作台的一种新型吊装结构。
In this paper, a unique hoisting structure of laser positioning stage system for electron-beam lithography machine is described.
基于静压气浮支撑和直线电机驱动的气浮定位工作台是一种典型的精密机械结构。
The closed aerostatic positioning stage driven by linear motor is a kind of typical precision machinery structure.
仿真结果表明，采用微定位工作台进行在线振动补偿，可有效地提高加工工件的表面质量。
The simulation results show that the machining accuracy of the workpiece can be effectively improved by utilizing the micro-positioning workpiece table to implement dynamic compensation.
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