高z材料因其高熔点和低溅射率近年来受到越来越多的关注,但是难熔材料的脆性等问题仍然是这类材料应用的一大障碍。
More attentions are paid to high Z materials because of their high melting point and low sputter rate, but such materials remain the problems of brittleness to which is harmful for their application.
动态tcis可以研究离子束轰击三元靶的复杂问题:如大剂量离子注入、择优溅射和界面混合等。
Dynamic TCIS code may investigate complex problems concerning three-elemental targets bombarded by energetic ions, such as the ion implantation at large dose, preferential sputtering, ion mixing, etc.
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