poly-silicon isolation
... polycrystal多晶 polycrystal isolation多晶硅隔离 polycryarrestine deposition多晶淀积 ...
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... pcmexchange脉码灯电话交换局 pci多晶硅隔离 pcm脉码灯 ...
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二氧化硅多晶硅隔离 dioxide polysilicon isolation
·2,447,543篇论文数据，部分数据来源于NoteExpress
另外，当有源硅区之间的隔离必须充当一离子注入步骤的一自行对准阻挡层时，所述多晶硅瓦片本身增加所述隔离的厚度。
In addition, the poly tiles themselves increase the thickness of the isolation between active silicon regions when it must serve as a self-aligned blocking layer for an ion implantation step.
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