因此抑制异常粒子的形成对提高同质外延金刚石膜的质量非常重要。
Suppressing the formation of abnormal particles is very important to improve the quality of homoepitaxial diamond.
采用大气下火焰法进行了金刚石单晶膜的同质外延实验。
In this paper, experiment of homogeneous epitaxial, growing of single crystal diamond film by flame method in atmosphere was conducted.
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