The composition of alloy films with high purity is in control. Results presented here provide a new method for magnetron sputtering Cu film contain insoluble substances.
合金薄膜纯度高,成分可控;且制备工艺简单,能够随时调节合金含量,为不互溶铜合金薄膜的制备提供了一种设计思路。
参考来源 - 溅射铜和铜合金薄膜的微观结构与性能MgxZn1-xO is a wide band-gap ternary alloy with similar structure to ZnO. When x<0.36, the alloy thin films keep the wurtzite structure.
MgxZn1-xO是与ZnO结构类似的宽带隙材料，研究表明当x的取值小于等于0.36时，合金薄膜会保持ZnO六角形纤锌矿结构。
参考来源 - 溶胶—凝胶法制备的Mg·2,447,543篇论文数据，部分数据来源于NoteExpress
本发明提供一种超细晶金属或合金薄膜及其制备方法。
The invention provides an ultra-fine grain metal membrane or an ultra-fine grain alloy membrane and a preparation method thereof.
用直流共溅射方法制备了富稀土-过渡族金属非晶态合金薄膜。
The rich rare earth transition metal amorphous films were prepared by DC double target co sputtering method.
采用真空气相沉积法在金刚石表面镀覆强碳化物金属或合金薄膜。
Using vacuum gas phase deposition, diamond surface is coated with strong carbide metal or alloy membrane.
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