利用界面连续条件，推得三层金属薄膜各层薄膜内电子温度和晶格温度在拉普拉斯域内的解析表达式。
Using consecutive conditions on interfaces, the expressions of electron gas and lattice temperature in Laplace transfonn domain are obtained for each layer of the three-layer thin metal film.
当光线倾斜入射时，各层光学薄膜的有效厚度变薄。
When used at oblique Angle, the effective thickness of each layer becomes thinner than that at normal Angle.
分析了微热板各层薄膜厚度、微热板下气隙高度、支撑桥尺寸、微热板面积大小对传感器加工、工作性能的影响，并结合实际工艺条件设计了一种采用不同支撑桥尺寸的传感器结构。
The effects of dimensions of MHP, gas gap, and supporting beams on fabrication and working performance of the sensor are analyzed, and a new sensor structure with unequal beams is designed.
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